The microstructural evolution of nanometer ruthenium films in Ru/C multilayers with thermal treatments

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[唯一标识符]:CDSITC.AEROSPACE.N92-16899
[文献来源]:美国航空航天数据库(aerospace)
[资源原始索取号]:N1992-16899; Reference AN: N92-16899
[标题]:The microstructural evolution of nanometer ruthenium films in Ru/C multilayers with thermal treatments
[作者]:NGUYEN T D; GRONSKY R; KORTRIGHT J B
[文摘]:The evolution of nanometer Ru films sandwiched between various C layer thickness with thermal treatments was studied by plan-view and cross-sectional Transmission Electron Microscopy. Plan-view observation provides information on the Ru grain size, while cross- sectional studies allow examination of the multilayer morphology. After annealing at 800 C for 30 minutes, the grain size in the 2 and 4 nm Ru layers show little difference from each other, while that in the 1 nm Ru layers depends strongly on the thickness of the C layers in the multilayers. It increases with decreasing C layer thickness. Agglomeration of the Ru layers is observed in 1nm Ru/1nm C multilayers after annealing at 600 C for 30 minutes. The evolution of the microstructures and layered structure stability of the Ru/C system is compared to that of W/C and Ru/B4C systems. (DOE)
[关键词]:HEAT TREATMENT; MICROSTRUCTURE ; RUTHENIUM ; THIN FILMS; TUNGSTEN ; BORON CARBIDES; ELECTRON MICROSCOPY
[出版年份]:1991
[专业领域]:SOLID STATE PHYSICS
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[唯一标识符]:CDSTIC.ISTP.1299623
[文献来源]:科学技术会议录索引(ISTP)
[文献类型]:科技会议
[标题]:On the Use of Laser-Doppler Vibrometry for Modal-Analysis - Analysis of the Uncertainty Associated to Scanning Systems Calibration
[作者]:M Martarelli;GM Revel;C Santolini
[出版单位]:Soc Experimental Mechanics IncBethel
[ISSN_ISBN]:0-912053-59-3
[会议名称]:16th International Modal Analysis Conference (IMAC) - Model Updating and Correlation,Santa Barbara, CA,February 2-5, 1998
[来源]:IMAC - PROCEEDINGS OF THE 16TH INTERNATIONAL MODAL ANALYSIS CONFERENCE, VOLS 1 AND 2,pp 1750-1757
[系列名称]:PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
[编辑者]:CSoc Expt Mech Inc
[主办单位]:Soc Exptl Mech
[地址]:M Martarelli,Univ_Ancona, Dipartimento Meccan, Via Brecce Bianche, I-60131 Ancona, Italy
[专业领域]:Mechanics,Engineering, Mechanical,Optics
[唯一标识符]:CDSTIC.ISTP.1690834
[文献来源]:科学技术会议录索引(ISTP)
[文献类型]:科技会议
[标题]:Dual Pole-Placement Controller with Direct Adaptation
[作者]:NM Filatov;H Unbehauen;U Keuchel
[出版单位]:Pergamon-Elsevier Science LtdOxford
[ISSN_ISBN]:0005-1098
[会议名称]:5th IFAC Symposium on Adaptive Control and Signal Processing,Budapest, Hungary,June 14-16, 1995
[来源]:AUTOMATICA,pp 113-117
[主办单位]:IFAC
[地址]:H Unbehauen,Ruhr_Univ_Bochum, Fac Elect Engn, Automat Control Lab, Univ Str 150, D-44780 Bochum, Germany
[专业领域]:Robotics & Automatic Control,Engineering, Electrical & Electronic